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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPH09205078(A)
申请公布日期
1997.08.05
申请号
JP19960011264
申请日期
1996.01.25
申请人
SONY CORP
发明人
SATO JUNICHI
分类号
C23F4/00;G11B5/39;H01L21/302;H01L21/3065;(IPC1-7):H01L21/306
主分类号
C23F4/00
代理机构
代理人
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地址
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