| 摘要 |
<p>The formation of dust particle agglomerates within a plasma reactor is controlled through adjustement of the ratio of the temperatures of two particle species within the plasma. Adjustement of the ratio of temperatures is achieved by means of one or more temperature control devices which alter the temperature of one particle species with respect to the temperature of a second particle species. The temperature of a neutral particle species may be adjusted with respect to the temperature of dust particles present within the plasma by heating or cooling the neutral gas supplied to the plasma chamber. Alternatively, the temperature of the dust particles may be raised or lowered with respect to the neutral gas particles by heating or cooling the substrate from which the dust particles emerge. In an alternative embodiment, dust particle agglomeration can be reduced by passing a shock wave transversely through the plasma region thereby increasing the temperature of plasma ions with respect to the temperature of the plasma electrons. Dust particle agglomeration may be used to provide additional protection for exposed surfaces in a plasma environment and is particularly suited to providing protection against energetic particles and radiation.</p> |
