| 摘要 |
PROBLEM TO BE SOLVED: To provide an electroluminescence element, having a high dielectric constant further with a good withstand voltage characteristic and using an insulation film of high performance index, and a method of manufacturing this electroluminescence element. SOLUTION: In this element, at least a conductive film 6, insulation films 7, 9, emitting layer 8 and an electrode 10 are provided on a substrate, by applying voltage across the conductive film 6 and the electrode 10, emitting of the emitting layer 8 is performed. Here, at least part of the insulation films 7, 9 are mainly composed of amorphous tantalum pentoxide, and whose performance index (ε0.εr.EBD:ε0 = vacuum dielectric constant,εr = substance dielectric constant, EBD = substance withstand voltage) is 8.0μC/cm<2> or more and in a composition TaxOy of the tantalum pentoxide of the insulation films 7 and 9, x and y are assumed as x=2, y=4.8 to 5.2, the insulation films 7, 9 can be manufactured by a method of manufacture including a process of heat treating applying a solution, containing at least 5 to 18mol.% tantalum alkoxide, 82 to 95mol.% water and 0.5 to 4.0mol.% hydrochloric acid, onto the substrate.
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