| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to test with high reliability by detecting the potential or landing point error of a charged particle beam at the emitting point in X and Y directions, and correcting the landing point error. SOLUTION: A landing point error detecting means 31 for detecting the landing point error of a charged particle beam in X and Y directions, memory means 32 and correction signal generating means 33 for generating a correction signal according to the stored landing point error value are provided. The landing point error in the X and Y directions is detected by the means 31 having a light pen 31A and a coordinate address generator 31B. Then, the detected value of the means 31 is stored in the means 32, and the stored landing point error value and its generating timing are supplied to the means 33. The means 33 generates the correction signal corresponding to the strain generating direction and strain amount of strainsΔY andΔX, the correction signal is given to the deflecting means 14 or 15 of an electron beam 12, and the scanning position of the beam 12 is corrected to correct the strain.
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