发明名称 SYNCHRONIZATION CONTROL APPARATUS AND METHOD
摘要 <p>PROBLEM TO BE SOLVED: To suppress the influence of a master control system on a slave control system due to its over-response by setting the correction effect of the synchronization error correction path to a low value while in the over-response condition. SOLUTION: In a synchronization error correction signal generating means 30 with input of the control error em of a master control system, a variable coefficient generating element 29 to generate a variable coefficient gamma varying according to the operating condition of the master control system and variable coefficient multiplier 38 to multiply by a factor of this coefficient are provided on a synchronization error correction path. Or in the generating means 30 with input of the control error gamma of the master control system, a filter 26 having a frequency characteristic other than the proportional gain characteristic is provided. The multiplier 28 is disposed on the synchronization error correction path added to a slave control system.</p>
申请公布号 JPH09199399(A) 申请公布日期 1997.07.31
申请号 JP19960020670 申请日期 1996.01.12
申请人 CANON INC 发明人 SATO MIKIO
分类号 H01L21/68;G03F7/20;H01L21/027;(IPC1-7):H01L21/027 主分类号 H01L21/68
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