发明名称 EXHAUSTING SYSTEM FOR ION-INJECTOR
摘要 <p>PROBLEM TO BE SOLVED: To eliminate corona discharge generation in an exhaust duct due to polluting substances and to prevent burning and damaging of an exhaust duct by suppressing reactions between byproducts in the exhausting duct and byproducts newly jetted out to the exhaust duct. SOLUTION: This system consists of an exhaust pump, which exhausts a gas in an ion injector 10 by being communicated with the inside of the ion injector 10 and also carried out exhaust operation corresponding to a constant operation signal, and an exhaust duct 16 whose one end is connected with the exhaust pump 12 and the other end is connected with a main duct 14 to lead the exhaust gas exhausted out of the pump 12 to the outside. A pollution suppressing means 20 to suppress production of polluting substances in the exhaust duct 16 by reactions between the exhaust gas newly exhausted through the exhaust pump 12 and byproducts in the exhaust gas already existing in the inside of the exhaust duct 16.</p>
申请公布号 JPH09199074(A) 申请公布日期 1997.07.31
申请号 JP19960334287 申请日期 1996.12.13
申请人 SAMSUNG ELECTRON CO LTD 发明人 OO SOUKON;BUN JIYOUEI;KIN TEIKON;BOKU SANYUU
分类号 H01J37/18;H01J37/317;H01L21/265;(IPC1-7):H01J37/317 主分类号 H01J37/18
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