SUBSTRATE PROCESSING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To prevent a control program for substrate processing control from being affected when the constitution of a substrate processing equipment is changed, by installing an intermediate program part which makes a virtual channel correspond to unit discrimination information of a processing unit, in the control part of each processing unit. SOLUTION: A communication control means 16 communicating substrate information to a control part 1 of other processing unit, and a data storage means 14 which stores received substrate information by making it correspond to each unit discrimination information are installed in the control part 1 of each processing unit. A control program part 11 storing a control program which assigns a virtual channel to a specified processing unit, performs reading and writing of substrate information from and to the data storage means 14 by using the channel and processes a substrate is installed. An intermediate program part 13 which makes the virtual channel correspond to an unit discrimination information and replaces the channel designated by the control program part 11 with the corresponding unit discrimination information is installed.