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发明名称
SURFACE INSPECTION APPARATUS
摘要
申请公布号
JPH09196644(A)
申请公布日期
1997.07.31
申请号
JP19960006244
申请日期
1996.01.18
申请人
METSUKUSU:KK
发明人
MIZUNO MASANOSUKE;SUGIURA YASUHIRO
分类号
G01B11/30;(IPC1-7):G01B11/30
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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