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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09199533(A)
申请公布日期
1997.07.31
申请号
JP19960005457
申请日期
1996.01.17
申请人
HITACHI DENSHI LTD
发明人
HIRAMA TOSHIAKI
分类号
H01L21/60;H01L21/321;H01L23/12;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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