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发明名称
SCANNING TYPE ELECTRON MICROSCOPE
摘要
申请公布号
JPH09199070(A)
申请公布日期
1997.07.31
申请号
JP19960009095
申请日期
1996.01.23
申请人
NIKON CORP
发明人
MIYAZAKI YASUMICHI
分类号
H01J37/20;H01J37/22;(IPC1-7):H01J37/22
主分类号
H01J37/20
代理机构
代理人
主权项
地址
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