摘要 |
PROBLEM TO BE SOLVED: To provide an atomic mass measuring device in which an atom ion, which is an object for measurement, is led surely to a detection part. SOLUTION: An auxiliary ion detecting part 7 having a probe hole is installed in a vacuum layer 2 of APFIM (a field-ion microscope for atom observation) apparatus 1. The atomic mass of an ion which collides against the circumference of the probe hole of the auxiliary ion detecting part 7 is measured by an auxiliary atomic mass measuring part 16. The atomic mass of an ion which passed the probe hole is measured by an ion detecting part 5. In the case all of the ions which collide against the circumference of the probe hole of the auxiliary ion detecting part 7 are the objective atom to be measured, the ions which pass the probe hole and reach the ion detecting part 5 are necessarily the objective atom ion to be measured. |