| 摘要 |
PROBLEM TO BE SOLVED: To provide a force detecting sensor which makes it possible to detect static change with a simple structure and has small drift and temperature characteristic and excellent response. SOLUTION: The force detecting sensor comprises a slender plate-like base 11 having flexibility, a ferromagnetic layer 12 coupled to one surface of the base 11 and having reverse magnetostrictive effect, and a variable inductance element 10 having a winding 13 wound on the peripheries of the base 11 and layer 12. When an external force is exerted on the base 11, the base 11 is deflected, a stress is operated at the layer 12, and, as a result, the permeability of the layer 12 is varied by the reverse magnetostrictive effect, and the inductance of the element 10 is varied. Accordingly, the magnitude of the force operating the element 10 can be measured by measuring the change or the inductance of the element. |
