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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH09199502(A)
申请公布日期
1997.07.31
申请号
JP19960005753
申请日期
1996.01.17
申请人
TOSHIBA CORP
发明人
SHIMADA SHINICHI
分类号
H01L21/28;H01L21/3205;H01L21/324;(IPC1-7):H01L21/320
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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