| 摘要 |
PROBLEM TO BE SOLVED: To provide the method for obtaining a distributed unidirectional interdigital electrode surface acoustic wave transducer provided with an open floating electrode between the interdigital electrodes and to provide an electronic device using the method. SOLUTION: The distributed interdigital electrodes formed on a piezoelectric substrate 1 are constituted by arranging an open floating electrode 8 (11) whose length is nearlyλ/12 between positive electrodes 7, 9 (negative electrodes 8, 12) whose length is nearlyλ/12. The distributed unidirectional interdigital electrode surface acoustic wave transducer 25 in the travelling direction is constituted by arranging an open floating electrode 8 (11) whose electrode width is nearlyλ/6 between interdigital positive electrodes 7, 9 (interdigital negative electrode 10, 12) whose electrode width is nearlyλ/6 or slightly narrower. In the manufacturing method of the transducer 25, when the electrode width is nearlyλ/6, the shade of resist is used to manufacture the electrodes.
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