| 摘要 |
<p>A system uses a portable carrier (32) for transporting wafers in a particle-free environment. A cassette (34) within the carrier is delivered to a clean load lock (22). A mini-environment (52) defines an interior region (54) for the reception of the carrier. Transfer mechanisms (68, 70) retrieve the cassette from the carrier and move it into the load lock chamber. A hood (78) of the mini-environment is movable between lowered and raised positions while maintaining a seal with its walls. Laminar flow air is continually directed through the mini-environment and filtered to remove particles from the wafers in the cassette.</p> |
