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发明名称
ELECTRONIC PARTS
摘要
申请公布号
JPH09199536(A)
申请公布日期
1997.07.31
申请号
JP19960005051
申请日期
1996.01.16
申请人
TOSHIBA CORP
发明人
TANAKA KENGO
分类号
H01L21/60;H01L21/603;H05K3/30;H05K3/32;H05K3/36;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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