| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting element and its manufacturing method whose wavelength is controlled simply and precisely at a low cost without using any expensive measurement apparatus. SOLUTION: Forming a wavelength controlling layer 16 on the intermediate layer including an active layer 14, a heat treatment is applied to this intermediate product to cancel the deviation from a design value obtained by a reflection spectroscopic measurement, etc. Hereupon, the refractivity of the wavelength controlling layer 16 is varied in response to its heat treatment temperature. Therefore, calculating the optimum refractivity which is the refractivity in the design value, the heat treatment temperature of the layer 16 is determined to obtain this optimum refractivity. Thereby, performing the heat treatment of the intermediate product at this heat treatment temperature, the wavelength of a surface emitting element can be controlled to obtain the wavelength coinciding with its design value. |
