| 摘要 |
PROBLEM TO BE SOLVED: To obtain a control method in which an electrification current value to a motor is suppressed small without making an apparatus large and without increasing its costs. SOLUTION: In a control method, the boat elevator of a semiconductor manufacturing apparatus is driven. The control method is constituted in such a way that the speed of rotation of an AC servomotor 10 is detected by an encoder 11, that the output of the encoder 11 is compared with a signal corresponding to a distance up to a CAP position (a rise limit position) which is input at an early stage, that the deviation between the present position of the boat elevator and the CAP position is found, that a current whose value is decided by proportionally integrating the deviation is supplied to the AC servomotor 10 until the boat elevator reaches the CAP position and that a current whose value is proportional to the deviation is supplied to the AC servomotor when the boat elevator reaches the CAP position. |
