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发明名称
ASSEMBLY-TYPE LINE-TYPE ENVIRONMENTAL TESTING APPARATUS AND ITS ASSEMBLING METHOD
摘要
申请公布号
JPH09197000(A)
申请公布日期
1997.07.31
申请号
JP19960026107
申请日期
1996.01.19
申请人
ORION MACH CO LTD
发明人
WAKUI MASAYUKI
分类号
G01R31/26;G01N17/00;G01R31/30;H01L21/66;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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