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经营范围
发明名称
ELECTRON BEAM TESTER
摘要
申请公布号
JPH09199554(A)
申请公布日期
1997.07.31
申请号
JP19960009410
申请日期
1996.01.23
申请人
TOSHIBA CORP
发明人
NORIMATSU KENJI
分类号
G01R31/302;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/302
代理机构
代理人
主权项
地址
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