| 摘要 |
PROBLEM TO BE SOLVED: To automatically estimate a nature of an internal face of a duct or the like with an apparatus for measuring surface nature inserted into the duct by applying shed light to a surface of an object to be measured and receiving and detecting the reflected light. SOLUTION: A semiconductor laser 1 outputs a certain amount of light by a drive circuit 2. Light L2 reflected on a measured surfaceα1 is detected by a two-dimensional position detecting element (PSD) 3. A PSD detection circuit 4 outputs a signal Po proportional to an amount of received light and signals (x-position signal S1 , y-position signal S2 ) proportional to a position (X coordinate, Y coordinate) of an image-formed point of the light L2 on the PSD 3. These signals Po, S1 , S2 are converted by an A/D-converter 5 and input to a microprocessor 6. Precietermined calculation is performed in the microprocessor 6, static characteristics stored in a memory system C in advance is compared with a measured value, and a parameter which is the closest to the measured value is selected. Thus a nature of an object to be measured can be automatically diagnosed from information on the amount of received light or information on scatter-reflectance.
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