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发明名称
HAIKISOCHI
摘要
申请公布号
JP2635036(B2)
申请公布日期
1997.07.30
申请号
JP19870009846
申请日期
1987.01.21
申请人
HITACHI SEISAKUSHO KK
发明人
KUDO KATSUYOSHI;KAWASAKI YOSHINAO;SORAOKA MINORU;TSUBONE TSUNEHIKO;KAWAHARA HIRONORI
分类号
F04B37/16;H01L21/3065;(IPC1-7):F04B37/16;H01L21/306
主分类号
F04B37/16
代理机构
代理人
主权项
地址
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