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发明名称
Silicon substrate structure
摘要
申请公布号
GB9711581(D0)
申请公布日期
1997.07.30
申请号
GB19970011581
申请日期
1997.06.04
申请人
HEWLETT-PACKARD COMPANY
发明人
分类号
H01L27/04;H01L21/02;H01L21/822;H01L21/8222;H01L29/06;H01L29/93
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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