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发明名称
PUROOBINGUKAADO
摘要
申请公布号
JP2635054(B2)
申请公布日期
1997.07.30
申请号
JP19870242990
申请日期
1987.09.28
申请人
TOKYO EREKUTORON KK
发明人
MASUOKA NOBORU
分类号
H01L21/66;G01R1/073;(IPC1-7):H01L21/66
主分类号
H01L21/66
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