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发明名称
Method for forming pattern
摘要
申请公布号
EP0747767(A3)
申请公布日期
1997.07.30
申请号
EP19960103506
申请日期
1996.03.06
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
ENDO, MASAYUKI;KATSUYAMA, AKIKO
分类号
G03F7/004;G03F7/039;G03F7/16;G03F7/20;G03F7/26;(IPC1-7):G03F7/004
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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