发明名称 Verfahren zur Herstellung einer integrierten Schaltung mit einem auf einer Keramikschicht basierenden hermetischen Schutz
摘要 This invention relates to integrated circuits which are protected from the environment. Such circuits are hermetically sealed by applying a non-corroding, conductive layer to the bond pads and additional ceramic layers to the primary passivation. <IMAGE>
申请公布号 DE69311774(D1) 申请公布日期 1997.07.31
申请号 DE1993611774 申请日期 1993.08.19
申请人 DOW CORNING CORP., MIDLAND, MICH., US 发明人 CAMILLETTI, ROBERT CHARLES, MIDLAND, MICHIGAN, US;CHANDRA, GRISH, MIDLAND, MICHIGAN, US;LOBODA, MARK JON, MIDLAND, MICHIGAN, US;MICHAEL, KEITH WINTON, MIDLAND, MICHIGAN, US;SIERAWSKI, DAVID ALAN, MIDLAND, MICHIGAN, US
分类号 H01L21/56;H01L23/28;H01L23/29;H01L23/31;H01L23/485;(IPC1-7):H01L21/316;C04B41/45;C04B41/50 主分类号 H01L21/56
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