发明名称 Method for manufacturing a fuse structure
摘要 A fuse structure is described in which a metallic frame is inserted between the insulation layers, through which the fuse window passes, and the final passivation layer. This frame is used as a mask during fuse window formation so alignment is simplified and problems arising from the presence of insulating residues on the surface of the fuse window layer are avoided.
申请公布号 US5652175(A) 申请公布日期 1997.07.29
申请号 US19960684071 申请日期 1996.07.19
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. 发明人 CHEN, DER-CHENG;CHOU, PENG-CHENG
分类号 H01L23/525;(IPC1-7):H01L21/70;H01L27/00 主分类号 H01L23/525
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