发明名称 |
Cryopump synchronous motor load monitor |
摘要 |
An apparatus and method for monitoring the torque load condition of a cryopump motor includes a power transducer for monitoring the electrical power input to the cryopump motor. A preferred embodiment of the power transducer includes a Hall-effect multiplier which measures the instantaneous and average electrical power input to the cryopump motor to determine torque load. Another preferred embodiment includes a power transducer which measures the Power Factor of the electrical power input to the cryopump motor to determine torque load. The Power Factor transducer includes a phase detector which detects the phase difference between the input voltage and the input current applied to the cryopump motor.
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申请公布号 |
US5651667(A) |
申请公布日期 |
1997.07.29 |
申请号 |
US19940183692 |
申请日期 |
1994.01.18 |
申请人 |
HELIX TECHNOLOGY CORPORATION |
发明人 |
SAND, WILLIAM T.;STEIN, MARTIN |
分类号 |
B01D8/00;F25B9/14;G01L3/00;(IPC1-7):B01D8/00 |
主分类号 |
B01D8/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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