发明名称 |
Inspection system for original with pellicle |
摘要 |
An inspection system inspecting an original with a pellicle, which system includes a light source for providing a light beam, a first detecting device for receiving light produced as a result of passage of the light beam through the pellicle, a second detecting device for receiving light produced as a result of non-passage of the light beam through the pellicle, and a processing system for determining information related to transmissivity of the pellicle, on the basis of outputs of the first and second detecting devices. |
申请公布号 |
US5652657(A) |
申请公布日期 |
1997.07.29 |
申请号 |
US19950467922 |
申请日期 |
1995.06.06 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
YOSHII, MINORU;KOHNO, MICHIO;MIURA, SEIYA;MIYAZAKI, KYOICHI;TSUJI, TOSHIHIKO;TAKEUCHI, SEIJI |
分类号 |
G01N21/88;G01N21/94;G01N21/956;G03F1/08;G03F1/14;G03F1/62;G03F1/84;H01L21/027;(IPC1-7):G01B11/00 |
主分类号 |
G01N21/88 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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