发明名称 CUTTING METHOD FOR THIN PLATE MATERIAL
摘要 <p>PROBLEM TO BE SOLVED: To continuously and automatically perform highly precise cutting without generating any flaw on a cutting part by downwardly moving the cut peripheral unnecessary part while holding it, releasing holding of the unnecessary part, and then discharging it outside a cutting device. SOLUTION: X-axis slide units 2A, 2B are moved in the axial direction, and a glass base plate 50 is cut in the X direction by a grinding wheel blade 34. After cutting is finished, a turning unit 3B is rotated clockwise at 90 deg. while sucking and holding the glass base plate on respective suction units 9A, 10A, 11A. The suction unit 10A is lowered by a motor 10E. The peripheral part of a first side of the glass base plate 50 on the suction unit 10A is sucked by a suction pad 21E, and vacuum suction of the suction unit 10A is released. The peripheral part is recovered into a storing box 22 by a slider 21B.</p>
申请公布号 JPH09193000(A) 申请公布日期 1997.07.29
申请号 JP19960002318 申请日期 1996.01.10
申请人 CANON INC 发明人 IMANARI TORU
分类号 B24B27/06;H01L21/301;(IPC1-7):B24B27/06 主分类号 B24B27/06
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