| 摘要 |
PROBLEM TO BE SOLVED: To carry out continuous mold releasing without deteriorating precision in working. SOLUTION: By injecting nitrogen ion into a molding surface under injecting conditions wherein ion accelerating energy is 10keV-40keV, and an injecting amount is 10<10> -10<20> ions/cm<2> , a mold tool is manufactured wherein maximum concentration is 10atm% or over, the maximum concentration of nitrogen exists to at least 1500Åfrom a surface, and maximum surface roughness Rmax is 0.5μm or under. |
