发明名称 COATING METHOD
摘要 PROBLEM TO BE SOLVED: To form a coating film without unevenness by holding the whole surface in a light-beam effective region of another face of an object matter by means of a holding fixture for covering. SOLUTION: In a coating method for coating a surface of a plate-shaped or lens-shaped object matter 1, in order to form a coating on one face of the object matter 1, a fixture which hermetically covers at least the whole face in a light-beam effective region of another face of the object matter 1 is used to hold the object matter 1, which is then immersed in a coating material liquid. Any kind of material can be used for making a coating fixture if the fixture can hold the object matter 1 and liquid does not enter an adsorption face. As a structure, a supporting member having a sucking disc-like fixture 3 can be used, or a sucking pipe having rubber-like material attached on an outer circumference and the like can be used for sucking the object matter 1 at a constant suction force in a hermetically sealed state.
申请公布号 JPH09192587(A) 申请公布日期 1997.07.29
申请号 JP19960006561 申请日期 1996.01.18
申请人 CANON INC 发明人 SHIMURA SHOICHI
分类号 G02B1/11;B05D1/32 主分类号 G02B1/11
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