| 摘要 |
PROBLEM TO BE SOLVED: To easily keep the light intensity to the desired value by adjusting the light attenuation factor in the light path based on the light intensity to keep the intensity of the irradiated light to the preset value. SOLUTION: A laser beam oscillator 30 is driven by a laser beam output controller 32 to emit the laser beam 34, which is split into the split beams 38-1 to 38-N by a plurality of beam splitters 36-1 to 36-N. The split beams 38-1 to 38-N are incident on optical fibers 44-1 to 44-N through a light intensity adjuster 39 and a converging lens 42. A light intensity detector is provided on an end part. The detected light intensity is inputted in a controller 62. When the detected light intensity is deviated from the target setting range, the controller 62 changes the attenuation factor of a variable light attenuator 40 through a light attenuation adjuster 41 of the light intensity adjuster 39 so that the intensity of the split beam 38 irradiating on a work 52 is in the target setting range. The arbitrary light intensity required for the laser beam machining can be easily obtained. |
