发明名称 ELECTRIC-DRIVEN BELT TYPE SEMI-CONDUCTOR MANUFACTURING DEVICE
摘要 <p>PROBLEM TO BE SOLVED: To recognize an accident as rapidly as possible by a worker, and to take an action when an abnormality is generated in transmitting the power by a belt while a work is achieved. SOLUTION: The driving force of a motor 10 is transmitted to a fan 20 through a driven pulley 11, a belt 30, and the driven pulley 21, the analog output voltage of a distance proximity sensor of electrostatic capacity type generated corresponding to the distance from an object is amplified by a voltage amplification part 50, the analog output signal of the voltage amplification part 50 is converted into the digital signal by an A/D conversion part 60, and then, outputted to a microprocessor 70 to judge absence/presence of an abnormality of the power transmission making use of the belt 30. A display part 81 is controlled by the microprocessor 70 according to the result of judgment, the condition of the power transmission is displayed on the display part 81, and alarmed by an alarm part 82 by controlling the alarm part 82.</p>
申请公布号 JPH09196131(A) 申请公布日期 1997.07.29
申请号 JP19960325646 申请日期 1996.12.05
申请人 SAMSUNG ELECTRON CO LTD 发明人 SAI HIROYOSHI
分类号 F16H7/00;F24F7/00;F24F7/007;H01L21/02;H01L21/68;(IPC1-7):F16H7/00 主分类号 F16H7/00
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