Membrane-type sensor especially mass flow sensor

摘要

A sensor element (21) has a membrane (22) which extends in a single crystal silicon frame (23) and which has a lower layer (2) of preferably tensile stressed, polycrystalline or amorphous silicon carbide. Also claimed is a method of producing a sensor element with a membrane by applying one or more membrane layers (2, 4, 5, 6) on a silicon wafer surface and then etching an opening (11) from the underside of the wafer, the novelty being that a polycrystalline or amorphous SiC layer (2) is deposited as the layer or lowermost layer for the membrane (22).