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发明名称
Verfahren zur Herstellung röhrenförmiger Mikrostrukturen in Festkörpern
摘要
申请公布号
DE59403155(D1)
申请公布日期
1997.07.24
申请号
DE19945003155
申请日期
1994.05.02
申请人
FORSCHUNGSZENTRUM ROSSENDORF EV, 01474 SCHOENFELD-WEISIG, DE
发明人
HEINIG, KARL-HEINZ, DR., D-01237 DRESDEN, DE;REISS, STEFAN, D-01474 ROSSENDORF, DE;SCHMIDT, BERND, DR., D-01187 DRESDEN, DE;SKORUPA, WOLFGANG, DR., D-01478 WEIXDORF, DE
分类号
C23C14/48;G02B6/10;H01L21/265;H01L21/74;H01L23/48;(IPC1-7):C23C14/48
主分类号
C23C14/48
代理机构
代理人
主权项
地址
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