Force sensor esp. pressure sensor

摘要

The force sensor has at least one measurement membrane (18) which is deflected by a changing force acting on it, which force is to be detected. The membrane has an associated device (26) integrated in the force sensor (10). The integrated device allows a definite deflection of the membrane independent of the external force F. The device is preferably a piezoelectric resistor whose voltage-force curve is known. The resistor may be integrated in the membrane. The resistor (28) may be arranged on a side of the membrane away from the force to be measured. The force sensor may be e.g. a capacitive sensor or a piezoresistive sensor. The sensor may have several membranes each with an associated device.