Verfahren und Vorrichtung zur kontinuierlichen Bereitstellung von Metalldampf für die chemische Abscheidung aus der Dampfphase,申请号DE19946003842-传众专利搜索

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发明名称	Verfahren und Vorrichtung zur kontinuierlichen Bereitstellung von Metalldampf für die chemische Abscheidung aus der Dampfphase
摘要
申请公布号	DE69403842(D1)	申请公布日期	1997.07.24
申请号	DE19946003842	申请日期	1994.01.13
申请人	CVD INC., WOBURN, MASS., US	发明人	TEVEROVSKY, ALEXANDER, CONCORD, MASSACHUSETTS 01742, US;MCDONALD, JAMES C., STONEHAM, MASSACHUSETTS 02180, US;PICKERING, MICHAEL A., DRACUT, MASSACHUSETTS 01826, US;KIRSCH, JEFFREY L., DRACUT, MASSACHUSETTS 01826, US
分类号	C23C14/24;C23C16/30;C23C16/44;C23C16/448;(IPC1-7):C23C16/30	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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