| 摘要 |
PURPOSE:To reduce thermal deformation of a lap surface by a method wherein a means to approximately uniformize temperature distribution in the direction of the thickness of a base plate part is mounted to a lap cell part. CONSTITUTION:Grooves 11 with a deep depth are formed in a lap cell part 14, and a ratio d/B of a groove depth (d) to a width B of the lap cell part is increased. As a result, since a quantity (q) of heat flows mainly in the direction of a side 15 of the lap cell part 14, inflow of heat to a base plate part 13 of lapping machine is prevented from occurring, temperature distribution in the direction of thickness is approximately uniformized at the base plate part 13, and thermal deformation is prevented from occurring to the base plate part 13. In the lap cell part 14, axially symmetrical type temperature distribution occurs to the lap cell part 14 and a temperature difference is produced, but the lap cell part 14 is separated by the grooved 11. Further, since the width B of the lap cell part 14 is low compared with the diameter of a lap surface plate, deformation of the lap cell part 14 can be ignored. Thus, thermal deformation of a lap surface 10 is reduced sharply. |
