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经营范围
发明名称
CHODENDOTAISOSHINOSEIZOHOHO
摘要
申请公布号
JP2634456(B2)
申请公布日期
1997.07.23
申请号
JP19890014742
申请日期
1989.01.24
申请人
FUJITSU KK
发明人
YOSHIKAWA KOTA
分类号
C01B13/20;C01G1/00;C01G3/00;C23C14/08;H01B12/06;H01B13/00;H01L39/24;(IPC1-7):H01L39/24
主分类号
C01B13/20
代理机构
代理人
主权项
地址
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