发明名称 |
PIEZOELECTRIC/ELECTROSTRICTIVE FILM TYPE CHIP |
摘要 |
<p>A piezo-electric/electrostrictive film type chip (50) includes: a ceramic substrate (70) having a spacer plate (74) having a windows-disposed pattern (100) having a plurality of window portions (75) and a thin closure plate (72) for closing the window portions (75) which is unitarily connected with the spacer plate; and a piezo-electric/electrostrictive working portion (71) having a lower electrode (81), a piezo-electric/electrostrictive layer (82), and an upper electrode (83), each being formed in the form of a layer and laminated in this order at a closure portion of the window (75) on the outer surface of the closure plate (72) by a film formation method. A pin hole (52) for positioning is formed in or near the center of gravity of the windows-disposed pattern (100). Deterioration of positional preciseness of the pin hole and a through hole of the piezo-electric/electrostrictive actuator can be minimized, and the piezo-electric/electrostrictive actuator can be unitarily connected with an ink nozzle member with high positional preciseness. <IMAGE></p> |
申请公布号 |
EP0785071(A1) |
申请公布日期 |
1997.07.23 |
申请号 |
EP19960924190 |
申请日期 |
1996.07.23 |
申请人 |
NGK INSULATORS, LTD.;SEIKO EPSON CORPORATION |
发明人 |
USUI, MINORU;KATAKURA, TAKAHIRO;AKAHANE, FUJIO;KAMOI, KAZUMI;SHINADA, SATOSHI;TAKEUCHI, YUKIHISA;TAKAHASHI, NOBUO |
分类号 |
B41J2/045;B41J2/14;B41J2/16;(IPC1-7):B41J2/045 |
主分类号 |
B41J2/045 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|