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发明名称
HANDOTAISOCHINOSEIZOHOHO
摘要
申请公布号
JP2633061(B2)
申请公布日期
1997.07.23
申请号
JP19900148997
申请日期
1990.06.06
申请人
MATSUSHITA DENKI SANGYO KK
发明人
TSUJI KAZUHIKO
分类号
H01L21/8238;H01L21/336;H01L27/092;H01L29/78;H01L29/786;(IPC1-7):H01L29/786;H01L21/823
主分类号
H01L21/8238
代理机构
代理人
主权项
地址
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