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发明名称
DENSHIBUHINNOJITSUSOSOCHI
摘要
申请公布号
JP2633631(B2)
申请公布日期
1997.07.23
申请号
JP19880171975
申请日期
1988.07.12
申请人
TOSHIBA KK;TOKYO KONPYUUTA ENJINIARINGU KK
发明人
IIDA MINEAKI;KAWACHI HIROHISA
分类号
H01L21/60;(IPC1-7):H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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