Method and apparatus for ion beam transport

摘要

Method and apparatus for maintaining an ion beam along a beam path (14) from an ion source (12) to an ion implantation station (16) where workpieces are treated with the ion beam. A beam neutralizer (44) is positioned upstream from the beam implantation station (16) and injects neutralizing electrons into the ion beam. A magnetic field is created upstream from the position of the beam neutralizer for inhibiting upstream movement of neutralizing electrons. A disclosed technique for setting up the magnetic field for inhibiting electron movement is with spaced apart first and second permanent magnets (M1, M2). <IMAGE>