| 摘要 |
PROBLEM TO BE SOLVED: To easily produce a metal mold for duplication of core shapes by using a polytimide film the surface of which is formed to prescribed rugged shapes as an original plate and subjecting this original plate to plating, the peeling the plating layer. SOLUTION: A polyamide acid soln. which is precursor of polyimide is applied by a method, such as spin coating, on a substrate 0 and is subjected to thermal imidization, by which the polyimide layer 1 is obtd. on the substrate. After a mask layer 2 is formed thereon, the mark layer is subjected to exposing and developing, by which patterned resist layer 3 are obtd. The mask layer parts not protected by the resist layer 3 are removed to obtain the desired wavequide paytterns. Only the exposed parts of the polyimide are each to the prescribed depth and thereafter, the remaining mask layers 2 are removed, by which the original plate for plating if obtd. The resulted original plating is plated to have the plating layers 6 deposited thereon and, finally, the plating layers 6 are peeled and the unnecessary parts are cut away, by which the desired metal mold is obtd. |
