INK JET HEAD AND PRODUCTION THEREOF

摘要

PROBLEM TO BE SOLVED: To enhance the bonding strength of a base material and a bonding member by a simple process by subjecting the surface of the base material to exposure treatment in the vapor pressure of tetraethyloxysilicate and subsequently applying heat treatment thereto under atmospheric pressure. SOLUTION: An undercoat layer 40 is formed on the bonding surface of the liquid chamber passage forming member of a nozzle plate 15 being a base material and the upper partition wall 17 of the liquid chamber passage forming member composed of a dry film resist is provided thereon. The undercoat layer 40 is formed by subjecting the nozzle plate to exposure treatment in vapor pressure of tetraethyloxysillcate(TEOS) being an under coat material and heat treatment is applied to the undercoat layer. As a result, even if a bonding member is composed of an org. material (e.g; DFR), the bonding strength is enhanced. A vapor atmosphere is usually 100mmHg pressure and the base material is allowed to stand for 5min in a room temp. state to form a film with a thickness of 50-1000Åand this film is heat-treated at 200-400 deg.C for 30min under atmospheric pressure.