| 摘要 |
PROBLEM TO BE SOLVED: To advantageously produce porous silica glass having a high quality substantially without causing the generation of bubbles. SOLUTION: This method for producing silica glass comprises introducing clean air into a small volume chamber 1, discharging an exhaust gas from the chamber, simultaneously subjecting the vapor of a silicon compound to a flame hydrolysis reaction in the flame of an oxygen-hydrogen burner to produce silicon glass fine particles, and sticking and depositing the produced silica glass fine particles on a seed bar 4 to produce the silica glass porous product. Therein, a closed mantle is formed so as to surround the small volume chamber 1, and the tip frame nozzle of the oxygen-hydrogen burner is forward or backward movably inserted into the nozzle-inserting hole 1a of the chamber in a non-airtight state. The nozzle of the burner is disposed at a position controlled with respect to the seed bar 4, and the clean air is introduced into the chamber so as to maintain the linear speed of the air around the flame within a range of 0.5-1m/sec. The produced silica fine particles are stuck and deposited on the seed bar 4 in a state where the exhaust gas is discharged from the chamber. |
