| 摘要 |
PROBLEM TO BE SOLVED: To obtain an ultra high density sintered material without causing a nodule formation during sputtering, suppressed in the generation of a foreign material, and having >=7.08g/cm<3> sintered density. SOLUTION: This ITO sintered material produced by a casting method, is obtained by using a slurry prepared by precipitating a coarse component in a tin oxide powder by allowing a dispersion solution in which the tin oxide powder is uniformly dispersed in an aqueous medium to stand, for a prescribed time, separating a supernatant portion containing a fine particle composition by a decantation treatment, and adding an indium oxide powder and a binder to the separated aqueous dispersion medium containing the tin oxide powder (<=4μm) and a dispersing agent. |
