| 摘要 |
PROBLEM TO BE SOLVED: To accurately perform the alignment of a grooved top plate and an element substrate by forming the leading ends opposed to emitting orifices of the respective groove parts of a grooved member equipped with the passage walls of liquid passages into a tapered shape. SOLUTION: An element substrate 10 composed of silicon is bonded to a support 15 by an adhesive and a plurality of heating resistors 11 are arranged on the element substrate 10 in one row and groove parts 14 are respectively formed between the heating resistors 11. A plurality of passage walls 13 forming liquid passages 17 guiding ink to emitting orifices 18 are formed to a grooved top plate 12 at the same arranging pitches as the groove parts 14. The leading ends of the groove parts 14 and the leading ends of the passage walls 13 are formed into a tapered V-shape and the width of the groove parts 14 is made wider than that of the passage walls. As a result, at a time of alignment, since the respective passage walls 13 move to the centers of the groove parts along the inclination of the leading ends of the groove parts 14, the alignment of the grooved top plate 12 and the element substrate 10 can be accurately performed. |
