发明名称 |
Method for making precision radomes |
摘要 |
Radomes having complexly curved, frequency selective surfaces are made with a high degree of precision to assure part-to-part uniformity in electrical performance using a three-dimensional conformal mask and a precision etch process. The mask has a transparent substrate and a patterned opaque layer on the substrate. We expose photosensitive material overlying a thin film metal layer (generally deposited on a dielectric) through the mask. Metal exposed by patterning the photosensitive material is etched with a CuCl2 and chloride salt solution, and the remainder of the layer of photosensitive material is removed to complete the patterning.
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申请公布号 |
US5650249(A) |
申请公布日期 |
1997.07.22 |
申请号 |
US19950464252 |
申请日期 |
1995.06.05 |
申请人 |
THE BOEING COMPANY |
发明人 |
DULL, DENNIS L.;JENSEN, DAVID G.;TICHENOR, DANIEL R. |
分类号 |
C23F1/02;G03F7/00;G03F7/24;H01Q1/42;H01Q15/00;H05K1/00;H05K3/00;H05K3/06;(IPC1-7):G03F9/00 |
主分类号 |
C23F1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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