发明名称 Method for making precision radomes
摘要 Radomes having complexly curved, frequency selective surfaces are made with a high degree of precision to assure part-to-part uniformity in electrical performance using a three-dimensional conformal mask and a precision etch process. The mask has a transparent substrate and a patterned opaque layer on the substrate. We expose photosensitive material overlying a thin film metal layer (generally deposited on a dielectric) through the mask. Metal exposed by patterning the photosensitive material is etched with a CuCl2 and chloride salt solution, and the remainder of the layer of photosensitive material is removed to complete the patterning.
申请公布号 US5650249(A) 申请公布日期 1997.07.22
申请号 US19950464252 申请日期 1995.06.05
申请人 THE BOEING COMPANY 发明人 DULL, DENNIS L.;JENSEN, DAVID G.;TICHENOR, DANIEL R.
分类号 C23F1/02;G03F7/00;G03F7/24;H01Q1/42;H01Q15/00;H05K1/00;H05K3/00;H05K3/06;(IPC1-7):G03F9/00 主分类号 C23F1/02
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